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Contents
Front Matter
Introduction
1.
Overview of Semiconductor Materials, pn Junction and Its Fabrication
2.
Basics of BJT and JFET
3.
MOS Capacitors
4.
Metal Oxide Semiconductor Field Effect Transistor (MOSFET)
5.
Metal Semiconductor Field Effect Transistor (MESFET)
6.
Modulation Doped Field Effect Transistor (MODFET)
7.
Charge Transfer Devices (CCD)
8.
CMOS Technology
9.
Volatile and Non Volatile Memories
10.
Tunnel Diodes
11.
Impatt Diode
12.
Transferred Electron Devices
13.
Optical Absorption-Solar Cell and Photodetectors
14.
Optical Absorption-Solar Cell and Photodetectors
15.
Physical Vapor Deposition Process
16.
Chemical Vapor Deposition Process
17.
Photolithography
18.
X-Ray and E-beam Lithography
19.
Etching Techniques
20.
Ion Implantation
21.
Thermal Oxidation
22.
Diffusion
23.
MEMS/NEMS Fabrication
24.
Electro Optic Devices
25.
SAW and Integrated Devices
26.
Pressure Sensor
27.
Cantilever
28.
Enose
29.
Resonator
30.
Semiconductor Based Optical Sensor
31.
Photolithography
Back Matter
Appendix
Semiconductor material and devices
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